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shenxing ceramic high precision corrosion resisting chemical fluid 99% alumina ceramic vacuum plate chuck

An alumina vacuum chuck is a high-precision vacuum clamping fixture made from high-purity aluminum oxide (Al₂O₃) ceramic. It uses uniform porous structure or micro-vacuum channels to generate stable negative pressure, securely holding thin, fragile workpieces like wafers, glass, and films without mechanical stress. Core Material & Properties ● Material: Ultra-pure 99% Al₂O₃ alumina ceramic (porous or dense) ● Mechanical: High hardness, scratch resistance, low deformation, excellent rigidity ● Thermal: High heat resistance, good thermal conductivity, stable in high-temperature processes ● Chemical: Outstanding corrosion resistance, electrical insulation, no contamination ● Structural: Uniform porosity ensures consistent vacuum distribution across the surface

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