shenxing ceramic high precision corrosion resisting chemical fluid 99% alumina ceramic vacuum plate chuck
An alumina vacuum chuck is a high-precision vacuum clamping fixture made from high-purity aluminum oxide (Al₂O₃) ceramic. It uses uniform porous structure or micro-vacuum channels to generate stable negative pressure, securely holding thin, fragile workpieces like wafers, glass, and films without mechanical stress.
Core Material & Properties
● Material: Ultra-pure 99% Al₂O₃ alumina ceramic (porous or dense)
● Mechanical: High hardness, scratch resistance, low deformation, excellent rigidity
● Thermal: High heat resistance, good thermal conductivity, stable in high-temperature processes
● Chemical: Outstanding corrosion resistance, electrical insulation, no contamination
● Structural: Uniform porosity ensures consistent vacuum distribution across the surface
Order(MOQ) :
1000Payment :
T/T
Technical Parameters
| Item | Unit | Zirconia ceramic | 99% alumina ceramic | 96% alumina ceramic | 95% alumina ceramic | Steatite ceramic | Mullite ceramic | Cordierite ceramic |
| Bulk density | g/cm3 | 6 | 3.8 | 3.7 | 3.6 | 2.8 | 2.2 | 2.3 |
| Water absorption | % | 0 | 0 | 0 | 0 | 0 | 12 | 12 |
| Thermal Conductivity | (w/m.k) | 10 | 19-30 | 16-28 | 14-24 | 2-3 | 2-6 | 1.3-1.8 |
| Resistance to thermal shock,Minimum | TK? | 70 | 150 | 140 | 140 | 80 | 150 | 300 |
| Withstand voltage,Minimum | KV | 15 | 20 | 18 | 18 | 20 | 25 | - |
| Flexural strength | Mpa | 1000 | 300 | 280 | 240 | 120 | 120 | 30 |
| Sintering temperature | ℃ | 1500 | 1670 | 1600 | 1600 | 1250 | 1250 | 1250 |
| Maximum working temperature | ℃ | 1200 | 1500 | 1200 | 1200 | 800 | 1000 | 1000 |
Application
Specifically used for high-temperature and high-voltage insulation parts, circuit substrates, high-temperature devices, etc. As the main representative of precision ceramic materials, it is widely used in industries such as semiconductors, petrochemicals, and electronics.

Advantages
1. we support OEM and ODM;
2. We have a professional R&D team and technical support;
3. We provide real-time logistics update information;
4. We support 24-hour online service;
5. We support T/T,L/c payment;
6. We have a professional QC team to check the quality before delivery.
Certificate

FAQ
1. How can you get quotation?
Please kindly send me your drawing with technic requirement and demand quantity.
If you don't have the drawing, please kindly courier samples to us. we will quote our best price in 24 hours.
2. How can you get samples?
We can supply free samples if we have them in stock. If we haven't produce the products, we can supply some free samples after getting tool fee. Please take note that the courier fee should be at destination.
3. What’s the lead-time for samples and batch orders?
It is 18days for supplying samples. It is around 25days for batch orders.
4. Can I visit you?
Sure. If you're a volume buyer and would like to visit our in-house products and production line, please contact us to make an appointment.
Yixing Shenxing Technology Co., Ltd.
Phone/WeChat/WhatsApp:008618018373518
Email: yxshenxing88@vip.163.com
Teams: siri shenxing ceramic
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