Alumina ceramic Vacuum plate

Alumina Vacuum Chuck (Al₂O₃ Vacuum Chuck)

Basic Introduction

An alumina vacuum chuck is a high-precision vacuum clamping fixture made from high-purity aluminum oxide (Al₂O₃) ceramic. It uses uniform porous structure or micro-vacuum channels to generate stable negative pressure, securely holding thin, fragile workpieces like wafers, glass, and films without mechanical stress.

Core Material & Properties

• Material: Ultra-pure 99% Al₂O₃ ceramic (porous or dense)

• Mechanical: High hardness, scratch resistance, low deformation, excellent rigidity

• Thermal: High heat resistance, good thermal conductivity, stable in high-temperature processes

• Chemical: Outstanding corrosion resistance, electrical insulation, no contamination

• Structural: Uniform porosity ensures consistent vacuum distribution across the surface

Key Features

• Works in both atmospheric and high-vacuum environments

• Adsorbs conductors, semiconductors, insulators, and porous materials

• Uniform adsorption force, no warping or local stress on thin workpieces

• Quick on/off, no residual potential, prevents dust attraction

• High surface flatness, suitable for ultra-precision processing

Main Applications

• Semiconductor: Wafer lithography, etching, polishing, and testing

• Display: Large/ultra-thin glass substrate handling

• Photovltaics: Silicon wafer cutting and testing

• Precision optics: Lens and optical component processing

Product Types

• Porous Alumina Chuck: Microporous structure for gentle, uniform adsorption

• Black Alumina Chuck: Reduces light reflection for photolithography

• Dense Alumina Chuck: High rigidity for heavy-duty precision clamping

Yixing Shenxing Technology Co., Ltd.

Phone/WeChat/WhatsApp:008618018373518

Email:  yxshenxing88@vip.163.com

Teams:  siri shenxing ceramic